the measurements principle is based on interferometr y with grazing incidence of light. this set-up allows for flatness measurements of polished as well as non-reflective, rougher surfaces, which would not be measurable w......the measurements principle is based on interferometr y with grazing incidence of light. this set-up allows for flatness measurements of polished as well as non-reflective, rougher surfaces, which would not be measurable with traditional interferometers for flatness testing. an air gap between prism and part ensures maximum possible protection against mechanical damage and facilitates simple handling.
