ultra-high-precision machine evolved through pursuit of nanometer-scale accuracy, realizing minimum driving distance of 10 nm for the first time in the world, "exc100l" is equipped with a totally no-contact x-y orthogonal......ultra-high-precision machine evolved through pursuit of nanometer-scale accuracy, realizing minimum driving distance of 10 nm for the first time in the world, "exc100l" is equipped with a totally no-contact x-y orthogonal table with the sodick-made air bearings, ceramic air sliders, and linear motors. furthermore, its minimum driving distance of 10 nm, made possible through combination with a high-resolution linear scale, supports stable ultra-high-precision machining. the optimum workmanship surpassing the expertise of veteran operators helps your manufacturing.